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Photomask Fabrication Technology Product Form:Hardback this text responds to theAuthor(s): Eynon, Benjamin G., Wu, Banqiu Publisher's Note: Products purchased from Third Party sellers are not guaranteed by the publisher for quality, authenticity, or access to any online entitlements included with the product. Photomasks are defect free optical templates the printing masters for the fabrication of integrated circuits (ICs). When IC feature sizes fall below the exposure tools source wavelength, photomask fabrication becomes